Microelectronic Semiconductor Space
Lucent Technologies / Agere Systems / LSI
- Installation of mechanical systems for new 120,000 square foot manufacturing facility, including HVAC systems and high purity process piping
- Installation of HVAC systems, HEPA filtration, process exhaust and process piping systems for 6,200 and 2,500 square foot, Class 1000 clean rooms
- Design and construct HVAC system, including radiant cooling panels, for an electron microscope laboratory that required precise temperature and room pressurization control